PIEZOELECTRIC ELEMENT, DROPLET JET HEAD, DROPLET JET DEVICE, AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric element that complicates the formation of a continuous leakage path on side surfaces of a piezoelectric layer.

SOLUTION: The piezoelectric element includes a first electrode 20, a piezoelectric layer 30 formed on the first electrode 20, and a second electrode 40 formed on the piezoelectric layer 30. Side surfaces of the piezoelectric layer 30 have a first wavy surface 32 provided with a plurality of first grooves 35 extending in the direction of the second electrode 40 from the first electrode 20, a second wavy surface 33 disposed nearer to the second electrode 40 than the first wavy surface 32 and provided with a plurality of second grooves 36 extending in the direction of the second electrode 40 from the first electrode 20, and a boundary region 34 between the first wavy surface 32 and the second wavy surface 33. First intervals of the first grooves 35 are different from second intervals of the second grooves 36.

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