RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND COMPOUND

摘要

PROBLEM TO BE SOLVED: To shorten the time required for reducing hydrophobicity after liquid immersion exposure while the hydrophobicity of a film surface in liquid immersion exposure is increased.

SOLUTION: There is provided a radiation-sensitive resin composition containing a polymer [A] comprising a repeating unit (a1) having a group represented by any of the following formulas (1-1) to (1-3) and also comprising a fluorine atom; and a radiation-sensitive acid generator [B].

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