发明名称 |
Workpiece Characterization System |
摘要 |
A workpiece characterization system for obtaining simultaneous measurement of layer and photoluminescence properties of a workpiece. The workpiece characterization system includes an excitation light and an illumination light each impinging upon a surface of a workpiece whereby the workpiece emits photoluminescent light and encodes light from said illumination source with layer information. The excitation light and the illumination light are generated from a single light source. The light from the single light source is filtered to remove wavelengths of light that correlate to light wavelengths emitted from the workpiece as a result of excitation. Wavelengths that correlate to light reflected from the workpiece that may contain encoded information are not filtered. |
申请公布号 |
US2012120387(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US201113286050 |
申请日期 |
2011.10.31 |
申请人 |
MELONI MARK ANTHONY;CORLESS JOHN DOUGLAS;KUENY ANDREW WEEKS;WHELAN MIKE |
发明人 |
MELONI MARK ANTHONY;CORLESS JOHN DOUGLAS;KUENY ANDREW WEEKS;WHELAN MIKE |
分类号 |
G01N21/64;G01B11/06 |
主分类号 |
G01N21/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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