METHOD FOR ANALYSING A SAMPLE BY ETCHING WITH A BEAM OF PARTICLES, AND APPARATUS THEREFOR,申请号EP19880402279-传众专利搜索

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发明名称	METHOD FOR ANALYSING A SAMPLE BY ETCHING WITH A BEAM OF PARTICLES, AND APPARATUS THEREFOR
摘要
申请公布号	EP0308304(B1)	申请公布日期	1991.08.07
申请号	EP19880402279	申请日期	1988.09.09
申请人	CAMECA;IMEC INTER UNIVERSITAIR MICRO-ELECTRONICA CENTRUM	发明人	VANDERVORST, WIELFRIED;RASSER, BERNARD;DE BISSCHOP, PETER
分类号	G01N27/64;G01N23/225;H01J37/256;H01J49/16	主分类号	G01N27/64
代理机构		代理人
主权项
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