| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method capable of measuring an optical axis direction of measuring light even in a laser interferometer in which a positioning range of a target is narrower than ever before and an optical axis of the measuring light is fixed. <P>SOLUTION: A measurement system 100 including a laser interferometer 104, a retroreflector 106 and a handling device 102 is used. The laser interferometer 104 irradiates the retroreflector 106 with measuring light and detects interference light intensity between the reflected light of the measuring light and reference light. The handling device 102 moves the retroreflector 106 up to a measuring position and detects position coordinate information. First of all, the laser interferometer 104 can detect interference light and selects at least four measuring positions p<SB POS="POST">i</SB>which do not exist on the same plane. The retroreflector 106 is moved to each measuring position p<SB POS="POST">i</SB>to detect the position coordinate information of the measuring position p<SB POS="POST">i</SB>. The laser interferometer 104 measures variation of distance up to the retroreflector 106. Vector information (a) of the measuring light is calculated based on the position coordinate information of each measuring position and the variation of each distance. <P>COPYRIGHT: (C)2012,JPO&INPIT |
