发明名称 |
Underlayer Developable Coating Compositions and Processes Thereof |
摘要 |
The present invention relates to a photoimageable underlayer composition comprising a polymer, a crosslinker comprising a vinyl ether group, and a thermal acid generator comprising a salt of a mono or polycarboxylic acid and an amine, where the amine has a boiling point of at least 150° C. The invention also relates to a process for forming an image in the underlayer comprising the novel composition.
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申请公布号 |
US2012122029(A1) |
申请公布日期 |
2012.05.17 |
申请号 |
US20100944420 |
申请日期 |
2010.11.11 |
申请人 |
KUDO TAKANORI;DIOSES ALBERTO;NG EDWARD;CHAKRAPANI SRINIVASAN;PADMANABAN MUNIRATHNA |
发明人 |
KUDO TAKANORI;DIOSES ALBERTO;NG EDWARD;CHAKRAPANI SRINIVASAN;PADMANABAN MUNIRATHNA |
分类号 |
G03F7/004;G03F7/20 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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