| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection apparatus and an inspection method that excel in inspection efficiency. <P>SOLUTION: An inspection apparatus 10 as an example of an optical module according to the present invention comprises: a table 40 on which an ingot 20 is placed; a light source 51 for radiating laser beam onto the ingot 20; a detector 61 for detecting light which is radiated by the light source 51 and scattered by the ingot 20; and a first movable table 53 that performs relative movement between the light source 51 and the table 40 in a thickness direction of the ingot 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
