TOOL POSITION MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a tool position measurement device capable of detecting a blade tip position of a minute rotary tool with high resolution and high accuracy for three directions of XYZ axes.

SOLUTION: A tool position measurement device includes a first optical device 22 which makes light in the Z axis direction incident on a blade tip 12a of a rotary tool 12 to receive its reflected light. The tool position measurement device has: a first imaging apparatus 24 which picks up a bottom blade image obtained by viewing the blade tip 12a from the Z axis direction; and a processing unit which measures a position of the rotary tool 12 based on the bottom blade image. The first optical device 22 has a first light source 30 which emits irradiated light in the X axis direction. The first optical device 22 has a first deflection mirror 38 which deflects the irradiated light in the Z axis direction to be made incident on the blade tip 12a and deflects the reflected light from the blade tip 12a in the X axis direction in the opposite direction. The tool position measurement device has a first objective lens 20 through which incident light and the reflected light pass between the blade tip 12a and the first deflection mirror 38. The first imaging apparatus 24 picks up the bottom blade image by the reflected light from the blade tip 12a deflected by the first deflection mirror 38.

COPYRIGHT: (C)2012,JPO&INPIT