发明名称 |
DEVICE HAVING A SANDWICH STRUCTURE FOR DETECTING THERMAL RADIATION, METHOD OF PRODUCTION AND USE OF THE DEVICE |
摘要 |
<p>In a device for the detection of thermal radiation and a method for production of such a device, a stack is formed with a detector support having a detector element for converting the thermal radiation into an electric signal, a circuit support with a read-out circuit for reading out the electrical signal and a cover to shield the detector element. The detector support and the cover are so arranged that a first stack cavity is formed between the detector element and the cover and a second stack cavity is formed between detector support and the circuit support. The first stack cavity and/or the second stack cavity is evacuated and hermetically sealed. In the manufacturing operation, functionalized silicon-substrates are stacked upon one another, firmly bonded together and subsequently sub-divided. Preferably, the detector elements are pyro-electric detector elements. The device finds application in motion detectors, presence reporters and thermal-image cameras.</p> |
申请公布号 |
EP2153188(B1) |
申请公布日期 |
2012.05.16 |
申请号 |
EP20080758830 |
申请日期 |
2008.05.28 |
申请人 |
PYREOS LTD. |
发明人 |
GIEBELER, CARSTEN;SCHREITER, MATTHIAS;ZAPF, JOERG |
分类号 |
G01J5/34;G01J5/10;H01L27/16;H01L31/0203 |
主分类号 |
G01J5/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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