Adhesive rubber type chucking device and substrates adhesion apparatus using the same

摘要

PURPOSE: A chucking device of a rubber bonding type and a substrate adhesive device are provided to perform the chucking of a glass substrate by an adhesive rubber. CONSTITUTION: A chucking device of a rubber bonding type includes a base plate(100) and a bonding module(101). The bonding module includes a rubber member(101b). A plurality of rubber members is arranged in the one side of the base plate. The rubber member supplies bonding force to a bonding object. The bonding module includes a metal support member(101a).