A modular lateral transfer system for use in a horizontally oriented processing chamber is provided. Each module has the ability to deliver process gas in addition to moving the reactant material through the horizontally oriented processing chamber. The modular design enables the operator to remove and replace a module of the system, thereby substantially minimizing the downtime of the chamber required during servicing.
申请公布号
EP2430383(A4)
申请公布日期
2012.05.16
申请号
EP20110750135
申请日期
2011.03.01
申请人
PLASCO ENERGY GROUP INC.;PLASCOENERGY IP HOLDINGS, S.L., BILBAO, SCHAFFHAUSEN BRANCH