发明名称 Operation Limiting Device, Operation Limiting Method, and Storage Medium
摘要 Provided is an operation limiting device which makes it possible to achieve more robust security and safety in processing of a workpiece by a processing apparatus. The operation limiting device limits operations relating to processing of a workpiece by a processing apparatus, and is provided with: an authentication unit for authenticating each of a plurality of users; a receiving unit for receiving an operation request or permission for said operation, from a plurality of authenticated users; an operation enabling unit for enabling an operation if an operation request or permission has been received from the plurality of authenticated users; and a releasing unit for releasing the operation enabled state set by the operation enabling unit if processing relating to the operation has terminated or if a predetermined period of time corresponding to the operation has elapsed.
申请公布号 US2015332039(A1) 申请公布日期 2015.11.19
申请号 US201314389223 申请日期 2013.03.29
申请人 TOKYO ELECTRON LIMITED 发明人 ASAKAWA Teruo;MURATA Naoko
分类号 G06F21/40 主分类号 G06F21/40
代理机构 代理人
主权项 1. An operation limiting device that limits an operation relating to a processing of a workpiece by a processing apparatus, comprising: an authentication unit that authenticates each of a plurality of users; a receiving unit that receives a request of an operation or permission of the operation from the plurality of users; an operation enabling unit that executes the operation if the plurality of users is authenticated and if the operation request or permission is received from the plurality of users; and a release unit that releases an operation enabled state set by the operation enabling unit if the processing relating to the operation is terminated or if a predetermined period of time according to the operation elapses after the execution of the operation.
地址 Tokyo JP