发明名称 |
Operation Limiting Device, Operation Limiting Method, and Storage Medium |
摘要 |
Provided is an operation limiting device which makes it possible to achieve more robust security and safety in processing of a workpiece by a processing apparatus. The operation limiting device limits operations relating to processing of a workpiece by a processing apparatus, and is provided with: an authentication unit for authenticating each of a plurality of users; a receiving unit for receiving an operation request or permission for said operation, from a plurality of authenticated users; an operation enabling unit for enabling an operation if an operation request or permission has been received from the plurality of authenticated users; and a releasing unit for releasing the operation enabled state set by the operation enabling unit if processing relating to the operation has terminated or if a predetermined period of time corresponding to the operation has elapsed. |
申请公布号 |
US2015332039(A1) |
申请公布日期 |
2015.11.19 |
申请号 |
US201314389223 |
申请日期 |
2013.03.29 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
ASAKAWA Teruo;MURATA Naoko |
分类号 |
G06F21/40 |
主分类号 |
G06F21/40 |
代理机构 |
|
代理人 |
|
主权项 |
1. An operation limiting device that limits an operation relating to a processing of a workpiece by a processing apparatus, comprising:
an authentication unit that authenticates each of a plurality of users; a receiving unit that receives a request of an operation or permission of the operation from the plurality of users; an operation enabling unit that executes the operation if the plurality of users is authenticated and if the operation request or permission is received from the plurality of users; and a release unit that releases an operation enabled state set by the operation enabling unit if the processing relating to the operation is terminated or if a predetermined period of time according to the operation elapses after the execution of the operation. |
地址 |
Tokyo JP |