| 发明名称 |
Imprinting machine and device manufacturing method |
| 摘要 |
<p>An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object.</p> |
| 申请公布号 |
EP2189843(B1) |
申请公布日期 |
2012.05.16 |
| 申请号 |
EP20100002526 |
申请日期 |
2005.12.08 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAKAMURA, TAKASHI;OTA, HIROHISA;KAWAKAMI, EIGO;KASUMI, KAZUYUKI;TOKITA, TOSHINOBU |
| 分类号 |
G03F7/00;B82Y10/00;G03F9/00 |
主分类号 |
G03F7/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
