| 摘要 |
A vibrating mirror element (100) includes a base member (10), a substrate (20) made of metal, integrally formed with a mirror portion (21), a movable portion (22) swingably supporting the mirror portion from both sides and functioning as a lower electrode, and a mounting portion (23) supporting the movable portion and mounted on the base member, a piezoelectric film (32) provided on the movable portion of the substrate and vibrating the mirror portion by application of a periodic voltage, and an upper electrode (33) provided on the piezoelectric film. |
