| 摘要 |
<p>A CCD comprises a two dimensional array of charge collection sites arranged in rows and columns, each row being associated with a plurality of electrodes such as polysilicon electrodes R1/, R1/2, R1/3 extending in the direction of the row, each electrode corresponding to a respective voltage phase I¦1 to I¦3. The resistivity of the polysilicon electrodes causes a time constant problem for the phase voltages when they appear at the central regions of the electrodes and, for this reason, it has been proposed to run a conducting strip along each polysilicon electrode to reduce its resistance (in a back-illuminated device, the strips would not obscure the incoming radiation). However, it is difficult to fabricate fine metal features, and this then places a restriction on how closely the rows can be spaced. According to the invention, conducting strips are provided which have repeatedly reversing portions inclined relative to the rows and in electrical contact with the electrodes of a corresponding voltage phase of several rows. Preferably, the conducting strips are zig-zag in shape to make multiple connections to each electrode to which it supplies the respective phase voltage.</p> |
