APPARATUS FOR ION SPUTTER COATING WITH AUTO CONTROL OF ION CURRENT

摘要

PURPOSE: An ion sputter coating device capable of automatically adjusting ion coating current is provided to enable precise ion coating in a high vacuum condition. CONSTITUTION: An ion sputter coating device capable of automatically adjusting ion coating current comprises a D/A(Digital/Analog) converter(130), an FET(Field Effect Transistor) unit(140), a high voltage transformer(150), a full bridge rectifier circuit(160), a current detecting unit(170), a comparator(120), and a pulse width modulator(110). The full bridge rectifier circuit generates DC high voltage by rectifying AC high voltage. The current detecting unit detects ion coating current corresponding to the DC high voltage. The comparator compares the ion coating current with the set ion coating current to create a difference value. The pulse width modulator transmits pulse according to the difference value to the FET unit.