| 摘要 |
<p>PURPOSE: A substrate transfer device and method are provided to shorten time which is required for transferring a substrate by improving a structure of a substrate position control part used for changing a substrate-moving direction. CONSTITUTION: A cassette(100a) loads a plurality of substrates(101). Substrate transfer parts(300, 500) transfer the plurality of substrates from the cassette to a unit processing chamber(800). A substrate position control part(600) adjusts a progressive direction of the substrate. The substrate position control part comprises a substrate rotation table(140) and a rotation driving part which lifts and rotates the substrate rotation table. A substrate unloading part(700) puts the substrate within the unit processing chamber through a robot arm.</p> |
