ADAPTER RING FOR SILICON ELECTRODE

摘要

Method and systems are provided for retrofitting wafer etching systems. The method and systems use an adapter ring (120) to retrofit wafer etching systems designed for use with multiple piece electrodes such that single piece electrodes can be used in the etching systems. A portion of the adapter ring (120) is disposed in a receptacle formed in a thermal coupled plate (110) in th wafer etching system. Another portion of the adapter ring is positioned in a channel formed in an upper electrode (130).