| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a screen printing device which can simply check whether substrate alignment precision is favorable or not in continuing manufacturing processes in a configuration which horizontally moves an imaging part having two imaging optical axes aimed at a substrate and a mask plate as imaging objects, and to provide a screen printing method. <P>SOLUTION: Prior to a mark imaging step carried out for the purpose of position detection of recognition marks for aligning the substrate and the mask, an optical axis calibration processing step of detecting a horizontal direction relative position between the imaging optical axes, and a surface correction data preparation processing step of detecting local position misregistration in the imaging optical axes caused by the movement of the imaging part are carried out. Before the start of manufacturing, a pre-manufacturing precision evaluation step is carried out for evaluating the substrate alignment precision using the validation substrate and the mask. After the start of the manufacturing, a post-manufacturing precision evaluation step of evaluating the substrate alignment precision after the start of the manufacturing is carried out using actual manufacturing substrate and the mask. <P>COPYRIGHT: (C)2012,JPO&INPIT |
