| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve cutting efficiency, reduce environmental impact, and enhance economic efficiency by developing a novel saw wire for a wire saw to be used for slicing a hard brittle substance such as a silicon ingot. <P>SOLUTION: A core material of the saw wire is coated with a clad material consisting of a valve metal, and if required, micro-arc oxidation treatment is applied after making a clad layer part uneven, a ceramic layer is formed on it, thereby providing the saw wire using no or an extremely small amount of abrasive grain powder and capable of cutting the hard brittle substance such as the silicon ingot. <P>COPYRIGHT: (C)2012,JPO&INPIT |
