发明名称 |
Apparatus and method of manufacture for depositing a composite anti-reflection layer on a silicon surface |
摘要 |
An apparatus and associated method are provided. A first silicon layer having at least one of an associated passivation layer and barrier is included. Also included is a composite anti-reflection layer including a stack of layers each with a different thickness and refractive index. Such composite anti-reflection layer is disposed adjacent to the first silicon layer. |
申请公布号 |
US8174014(B2) |
申请公布日期 |
2012.05.08 |
申请号 |
US20090632583 |
申请日期 |
2009.12.07 |
申请人 |
PAIN BEDABRATA;CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
PAIN BEDABRATA |
分类号 |
H01L29/04 |
主分类号 |
H01L29/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|