发明名称 |
Micromechanical component having multiple caverns, and manufacturing method |
摘要 |
A micromechanical component having at least two caverns is provided, the caverns being delimited by the micromechanical component and a cap, and the caverns having different internal atmospheric pressures. The micromechanical component and cap are hermetically joined to one another at a first specifiable atmospheric pressure, then an access to at least one cavern is produced, and subsequently the access is hermetically closed off at a second specifiable atmospheric pressure. |
申请公布号 |
US8174082(B2) |
申请公布日期 |
2012.05.08 |
申请号 |
US20050628100 |
申请日期 |
2005.04.28 |
申请人 |
FISCHER FRANK;GRAF ECKHARD;STAHL HEIKO;KUEPPERS HARTMUT;SCHEUERER ROLAND;ROBERT BOSCH GMBH |
发明人 |
FISCHER FRANK;GRAF ECKHARD;STAHL HEIKO;KUEPPERS HARTMUT;SCHEUERER ROLAND |
分类号 |
H01L27/14;B81B7/00;B81C1/00 |
主分类号 |
H01L27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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