发明名称 |
ELECTRONIC APPARATUS CONTAINING LANTHANIDE YTTRIUM ALUMINUM OXIDE |
摘要 |
Electronic apparatus and methods of forming the electronic apparatus include a lanthanide yttrium aluminum oxide dielectric film on a substrate for use in a variety of electronic systems. The lanthanide yttrium aluminum oxide film may be structured as one or more monolayers. The lanthanide yttrium aluminum oxide film may be formed by a monolayer or partial monolayer sequencing process such as using atomic layer deposition. |
申请公布号 |
US2012108052(A1) |
申请公布日期 |
2012.05.03 |
申请号 |
US201213345984 |
申请日期 |
2012.01.09 |
申请人 |
AHN KIE Y.;FORBES LEONARD |
发明人 |
AHN KIE Y.;FORBES LEONARD |
分类号 |
H01L21/31;H01L21/283 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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