发明名称 TEXTURE-ETCHANT COMPOSITION FOR CRYSTALLINE SILICON WAFER AND METHOD FOR TEXTURE-ETCHING (1)
摘要 The present invention relates to a texture-etchant composition for a crystalline silicon wafer to form a micro-pyramidal structure that can maximize the light absorption on the surface of the crystalline silicon, and a method for etching the crystalline silicon wafer using same, in a crystalline silicon wafer texture-etching composition comprising (A) an alkali compound, (B) a cyclic compound having a boiling point of 100? or above,(C) a compound having silica, and (D) water, and a method for etching a crystalline silicon wafer using same.
申请公布号 WO2012021026(A3) 申请公布日期 2012.05.03
申请号 WO2011KR05949 申请日期 2011.08.12
申请人 DONGWOO FINE-CHEM CO., LTD.;HONG, HYUNG-PYO;LEE, JAE-YOUN;LIM, DAE-SUNG 发明人 HONG, HYUNG-PYO;LEE, JAE-YOUN;LIM, DAE-SUNG
分类号 C23F1/32;C23F1/40;H01L21/306 主分类号 C23F1/32
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