METHOD AND APPARATUS FOR WASHING MOLD FOR IMPRINTING APPLICATIONS, AND PROCESS FOR PRODUCING MOLD FOR IMPRINTING APPLICATIONS

摘要

A washing method for removing a mold release layer that is bound to a base through a siloxane bond from a mold for imprinting applications that comprises the base and the mold release layer, which comprises a first washing step and a second washing step, wherein the first washing step involves reducing the water contact angle of the surface of the mold release layer and the second washing step involves bringing the mold release layer that has undergone the first washing step into contact with an alkaline washing solution.