| 发明名称 |
LOW TEMPERATURE COEFFICIENT RESISTOR IN CMOS FLOW |
| 摘要 |
A method for adding a low TCR resistor to a baseline CMOS manufacturing flow. A method of forming a low TCR resistor in a CMOS manufacturing flow. A method of forming an n-type and a p-type transistor with a low TCR resistor in a CMOS manufacturing flow. |
| 申请公布号 |
US2012108020(A1) |
申请公布日期 |
2012.05.03 |
| 申请号 |
US201113288700 |
申请日期 |
2011.11.03 |
| 申请人 |
BALDWIN GREG CHARLES;BENAISSA KAMEL;LIU SARAH;ZHAO SONG;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BALDWIN GREG CHARLES;BENAISSA KAMEL;LIU SARAH;ZHAO SONG |
| 分类号 |
H01L21/8238;G05B15/00 |
主分类号 |
H01L21/8238 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
