发明名称 |
THE APPARATUS TO PASSIVATE SUPERCONDUCTING METAL CIRCUIT ON A MEMS DEVICE IN WET CHEMICAL ETCHING AND THE WET CHEMICAL ETCHING USING THE APPARATUS |
摘要 |
PURPOSE: A cross section wet etching apparatus and method for protecting a superconducting metal circuit surface during the manufacture of a MEMS device using wet etching are provided to prevent damage to a superconductive metal of a MEMS substrate when depositing SiN on the MEMS substrate and to prevent direct exposure of a superconductive metal circuit on the MEMS device to an etching liquid. CONSTITUTION: A cross section wet etching apparatus for protecting a superconducting metal circuit surface comprises an etching protection plate(100) which is deposited with SiN or Si3N4 films on both sides thereof, a MEMS substrate(200) which is attached to one side of the etching protection plate to manufacture a device with a superconductive metal circuit, a first jig(300) which is attached to the other side of the MEMS substrate, and a second jig(400) which is coupled with the first jig by a fastening unit(310).
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申请公布号 |
KR20120041304(A) |
申请公布日期 |
2012.05.02 |
申请号 |
KR20100102701 |
申请日期 |
2010.10.21 |
申请人 |
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE |
发明人 |
CHOI, JAE HYUK;KIM, JEE YOUNG;KIM, YUN WON;CHOI, HEON HWA;LEE, KWANG CHEOL |
分类号 |
C23F1/08;C23F1/02;C23F1/24;C23F17/00 |
主分类号 |
C23F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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