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发明名称
METHOD FOR CLEANING A WORKPIECE WITH HALOGEN IONS
摘要
申请公布号
EP1819846(B1)
申请公布日期
2012.05.02
申请号
EP20050816246
申请日期
2005.11.29
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
KRUEGER, URSUS;PYRITZ, UWE;SCHIEWE, HEIKE;ULLRICH, RAYMOND
分类号
C23G5/00;B08B7/00;G01N21/68;G01N21/71
主分类号
C23G5/00
代理机构
代理人
主权项
地址
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