发明名称 |
Bubbler for constant vapor delivery of a solid chemical |
摘要 |
A bubbler chamber assembly comprising one chamber or two or more chambers connected in series, all chambers being in substantially vertical orientation. A solid or liquid source of the compound is contained in the chamber or chambers. The ratio between the length of the chamber or combined length of chambers connected in series with respect to the direction of flow of the carrier gas through the chamber or chambers and the average diameter equivalent of the cross section of the chamber or chambers with respect to the direction of flow of the carrier gas through the chamber or chambers is not less than about 6:1. |
申请公布号 |
US8170404(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20050579889 |
申请日期 |
2005.05.17 |
申请人 |
TRAN NAM HUNG;DEAVENPORT DENNIS L.;KO TAEHO;EL-ZEIN NADA;AKZO NOBEL N.V. |
发明人 |
TRAN NAM HUNG;DEAVENPORT DENNIS L.;KO TAEHO;EL-ZEIN NADA |
分类号 |
A01G13/06;B05C11/00;C23C16/448 |
主分类号 |
A01G13/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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