发明名称 |
Method of stabilizing a frequency of a piezoelectric vibration element |
摘要 |
A method of stabilizing a frequency of a piezoelectric vibration element includes: disposing the piezoelectric vibration element in an atmosphere of a vapor of a ring-shaped dimethylpolysiloxane molecule, the piezoelectric vibration element having a metal layer on a surface of a piezoelectric substrate formed of a thickness shear based piezoelectric material; and making the ring-shaped dimethylpolysiloxane molecule subject to chemical absorption with a surface of the metal layer to form a layer of the ring-shaped dimethylpolysiloxane molecule. |
申请公布号 |
US8166621(B2) |
申请公布日期 |
2012.05.01 |
申请号 |
US20080155821 |
申请日期 |
2008.06.10 |
申请人 |
OHSHIMA TSUYOSHI;HASEGAWA SHIN;WATANABE NORIYUKI;SEIKO EPSON CORPORATION |
发明人 |
OHSHIMA TSUYOSHI;HASEGAWA SHIN;WATANABE NORIYUKI |
分类号 |
C23C16/22;H04R17/10 |
主分类号 |
C23C16/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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