PLASMA STERILIZATION APPARTUS, PLASMA STERILIZATION SYSTEM AND PLASMA STERILIZATION METHOD

摘要

The purpose is to provide an apparatus that, when performing sterilization using plasma, performs sterilization very efficiently by measuring a specific light emission spectrum and assessing microbe activity/inactivity in real time. The solution is to apply plasma to an object to be treated from a plasma source connected to an AC power supply and detect light emission from the object being treated that arises from the plasma application with an emission intensity-detecting unit. By detecting the wavelength intensity of hydrogen or hydroxyl groups in particular, microbe activity/inactivity can be assessed at an early stage. Consequently, output of the power supply can be controlled as appropriate for the sterilization.