摘要 |
<p>[Problem] Provide a base film of a tape for a semiconductor production process. [Solution] The base film of a tape for a semiconductor production process is a substrate film formed from A) an ionomer resin that is obtained by subjecting a dipolymer, the polymer structural units of which are ethylene and (meth)acrylic acid, to crosslinking by metal ions, and B) a substance containing a terpolymer, the polymer structural components of which are ethylene, (meth)acrylic acid, and (meth)acrylic acid alkyl ester, wherein the amount of component B) used is within a range of at least 5 mass% to no more than 50 mass% on the basis of the total amount of components A) + B).</p> |