| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect an edge of a detection target with accuracy by one-time imaging, and to improve an edge detection accuracy by narrowing a range where edge detection errors caused by interpolation correction of line defective pixels may be generated, in a system of detecting the edge of the detection target by performing a subpixel process on a gray image obtained by imaging the detection target by an imaging element having a line defect. <P>SOLUTION: In a state that an imaging element or a detection target is rotated by a predetermined angle so that an edge of one side of the detection target is not parallel to respective horizontal and vertical scan lines of the imaging element, the imaging target is imaged, and a gray image is taken into a control device. A subpixel process is performed on the gray image, which is obtained by interpolation correction of the brightness of a line defective pixel by the brightness of pixels adjacent to the line defective pixel on both sides, and an edge of the detection target is detected. At the time, in the case that the detection target is a rectangular component, the imaging element or the detection target is rotated by the predetermined angle so that four sides of the detection target are not parallel to the respective horizontal and vertical scan lines of the imaging element. <P>COPYRIGHT: (C)2012,JPO&INPIT |
