| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contact structure capable of stably performing opening/closing operation by reducing the fixation between contact surfaces, and also to provide a manufacturing method of the contact structure and a micro relay using the contact structure. <P>SOLUTION: A contact structure 8 of a micro relay includes a fixed contact 1 and a movable contact 2. With the use of a plurality of convex parts 3b, which are formed by using a silicon or glass substrate, as a foundation, at least one of the contacts provides convex contact parts 4 by forming a film in such a manner as to cover the convex parts 3b with a contact material. The plurality of convex contact parts 4 are formed at positions to be threefold symmetric with respect to an axis passing through a center X on a contact surface 7 in plan view. <P>COPYRIGHT: (C)2012,JPO&INPIT |
