| 发明名称 |
METHOD FOR MANUFACTURING A FILM STRUCTURE |
| 摘要 |
Provided is a method for manufacturing a film structure. The method for manufacturing the film structure n includes forming a layer of a precursor material on a substrate, preheating the precursor material, and irradiating the precursor material with microwave radiation to form the film structure. |
| 申请公布号 |
US2012100649(A1) |
申请公布日期 |
2012.04.26 |
| 申请号 |
US201113100149 |
申请日期 |
2011.05.03 |
| 申请人 |
|
发明人 |
KIM YOUNG-MIN;JANG SEON-PIL;KIM BO-SUNG;JEONG YEON-TAEK;LEE YONG-SU;CHOI TAE-YOUNG;LEE KI-BEOM;JO KANG MOON |
| 分类号 |
H01L33/08;B05D3/02;B05D3/06;B05D5/00;B05D5/06;H01L21/26;H01L21/336 |
主分类号 |
H01L33/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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