| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a feed mechanism for a stage capable of coping with enlargement of the stage without restriction on contact pressure between a rotating shaft and a propelling structure part and further avoiding the collision between the stage or the propelling structure part and the other constituent member during coarse movement. <P>SOLUTION: The feed mechanism for the stage includes: the stage on which an object is placed; a driving shaft for driving the stage by rotation; a conversion part for pressurizing and holding the driving shaft to convert the rotation of the driving shaft to the driving of the stage; an actuator for pressurizing and holding the driving shaft of the conversion part and releasing the pressurizing and holding; and a control part for controlling the actuator. <P>COPYRIGHT: (C)2012,JPO&INPIT |
