发明名称 |
METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PREDICTING CATHODE LIFETIME |
摘要 |
A method of controlling operation of an indirectly-heated cathode (IHC) ion source comprises a step of measuring a rate of loss of cathode weight of the IHC ion source that occurs during operation using a first cathode configuration and under a first set of operation conditions. A maximum weight loss for the first cathode configuration is determined, and a cathode lifetime is calculated based upon the rate of cathode weight loss and the maximum weight loss. A further method comprises receiving a minimum source bias power value for operation of a cathode in a first configuration, measuring a rate of decrease in source bias power for a cathode in the first configuration, and calculating a lifetime of the cathode based upon the minimum source bias power and rate of decrease in source bias power.
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申请公布号 |
US2012101742(A1) |
申请公布日期 |
2012.04.26 |
申请号 |
US20100912312 |
申请日期 |
2010.10.26 |
申请人 |
LOW RUSSELL J.;DANIELS KEVIN M.;KOO BON-WOONG;WHITE RICHARD M.;BLANCHETTE JAMES W.;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
LOW RUSSELL J.;DANIELS KEVIN M.;KOO BON-WOONG;WHITE RICHARD M.;BLANCHETTE JAMES W. |
分类号 |
G06F19/00 |
主分类号 |
G06F19/00 |
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