| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an oscillation type pressure sensor which can be functioned without reducing a sensitivity for measurement pressure and without being buckled even under high static pressure. <P>SOLUTION: The present invention relates to an oscillation type pressure sensor including a plate-like diaphragm provided in a silicon substrate and an oscillation beam provided in the diaphragm. The oscillation type pressure sensor further includes a buckling prevention member of which the one surface is brought into contact with at least one surface of the diaphragm, and which is disposed along an edge of the diaphragm and ring-shaped and has a Young's modulus greater than that of the silicon substrate, for preventing the oscillation beam from being buckled under high static pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
