发明名称 SEPARATION APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a separation apparatus that can efficiently separate a waste fluid containing silicon wastes into the silicon wastes and water in an easily recyclable state. <P>SOLUTION: The separation apparatus includes: a liquid tank 21 for storing the waste fluid where water contains silicon wastes; and a silicon separation mechanism 22 disposed in the liquid tank 21. The silicon separation mechanism 22 includes: an adsorption plate 25 provided in the liquid tank 21 and adsorbing silicon wastes in the waste fluid; a silicon passing regulating device 26 that permits only the water in the waste fluid to pass and controls the passing of silicon wastes; an adsorption plate moving device 30; and a separator 40. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012081385(A) 申请公布日期 2012.04.26
申请号 JP20100227852 申请日期 2010.10.07
申请人 DISCO CORP 发明人 ISHIGURO HIROTAKA;YOSHIDA MIKI;FURONAKA TAKESHI
分类号 B03C5/02 主分类号 B03C5/02
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