| 摘要 |
An organic EL device having a long service life is manufactured. Manufacturing apparatuses (1-3) have operation chambers (11a-11c) for forming an organic material layer and a sealing material layer and for bonding substrates (7a, 7b), and the operation chambers are provided with heating apparatuses (12a-12c). Prior to performing operation, the walls of the operation chambers (11a-11c) are heated by the heating apparatuses (12a-12c), impurity gases such as water attached on the inner wall surface are removed, and the removed impurity gases are discharged by exhausting the operation chamber (11). Since the operation is performed in the atmosphere from which the impurity gases are discharged, the impurity gases do not mix in the organic EL device. |
