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发明名称
DETERMINING LAYER THICKNESS USING PHOTOELECTRON SPECTROSCOPY
摘要
申请公布号
EP1875485(A4)
申请公布日期
2012.04.25
申请号
EP20060750862
申请日期
2006.04.19
申请人
REVERA INCORPORATED
发明人
SCHUELER, BRUNO
分类号
H01J40/00
主分类号
H01J40/00
代理机构
代理人
主权项
地址
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