| 摘要 |
An equipment for metal-laser sintering process includes a powder layer forming unit, an irradiation unit which irradiates light beams, a correction target on which a correction mark serving as a fiducial in correction of the irradiation points of the light beams is formed, and an imaging camera which takes an image of the correction mark. The correction target is formed of a material which is melted by irradiation of light beam so as to be formed a through hole. The correction target is disposed on the substrate and the light beams are irradiated to penetrate the correction target so that the correction mark is formed. Subsequently, the imaging camera takes an image of the correction mark and the location of the correction mark is measured, and thus, correction of the irradiation points is performed. Since the correction mark is formed to be a through hole, contrast becomes clear so that location of the correction mark can be measured easily, and the correction of the irradiation points of the light beams can be performed easily. |
