发明名称 Method of initiating molecular bonding
摘要 A method of initiating molecular bonding, comprising bringing one face of a first wafer to face one face of a second wafer and initiating a point of contact between the two facing faces. The point of contact is initiated by application to one of the two wafers, for example, using a bearing element of a tool, of a mechanical pressure in the range from 0.1 MPa to 33.3 MPa.
申请公布号 US8163570(B2) 申请公布日期 2012.04.24
申请号 US20090936639 申请日期 2009.08.06
申请人 CASTEX ARNAUD;BROEKAART MARCEL;SOITEC 发明人 CASTEX ARNAUD;BROEKAART MARCEL
分类号 H01L21/00;H01L21/30 主分类号 H01L21/00
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