ORGANIC EL DEVICE MANUFACTURING APPARATUS AND ORGANIC EL DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an organic EL device manufacturing apparatus and method which reduces breakage of a substrate or the like to have a high operating ratio.

SOLUTION: The organic EL device manufacturing apparatus and method comprises the steps of: relatively moving a vapor deposition stage having a substrate mounted thereon and a mask; bringing the substrate and the mask into close contact with each other; and vapor-depositing a vapor deposition material on the substrate in a vacuum atmosphere. With respect to the close contact, a load on a driving source is monitored as a state quantity, and the movement is controlled on the basis of changes in the state quantity.

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