| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron microscope achieving such a function that the position of a crossover can be freely adjusted while potentials of an extraction electrode and an acceleration electrode are fixed. <P>SOLUTION: A particle beam device includes: a first electrode unit 24 comprising three electrodes which are arranged along an optical axis and in which a first electrode 4 and a third electrode 9 lie at a predetermined first potential and a second electrode 8 lies at a variable second potential; and further a second electrode unit 26 comprising three electrodes in which a fifth electrode 16 lies at a variable third potential. In the particle beam device, a first accelerator 17 and a second accelerator 18 are set at a fourth potential and a fifth potential, respectively. <P>COPYRIGHT: (C)2012,JPO&INPIT |
