TEMPERATURE MEASUREMENT METHOD, STORAGE MEDIUM AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a temperature measurement method which can measure temperature of an object to be measured more accurately than a conventional method even when a thin film is formed on the object to be measured.

SOLUTION: The temperature measurement method comprises: a step of transmitting light from a light source to a measurement point of an object to be measured which is a substrate on which a thin film is formed; a step of measuring a first interference wave caused by reflected light at a front surface of the substrate and a second interference wave caused by reflected light at a boundary surface between the substrate and the thin film and at a back surface of the thin film; a step of calculating an optical path length from the first interference wave to the second interference wave; a step of calculating a thickness of the thin film based on intensity of the second interference wave; a step of calculating optical path difference between an optical path length of the substrate and the calculated optical path length based on the calculated thickness of the thin film; a step of correcting the calculated optical path length from the first interference wave to the second interference wave based on the calculated optical path difference; and a step of calculating temperature of the object to be measured at the measurement point based on the corrected optical path length.

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