| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent dispersion in an impregnation amount of a prescribed chemical liquid, and to prevent deterioration of easiness of takeout by increasing an impregnation rate of the prescribed chemical liquid. <P>SOLUTION: A press device 15 includes: a plurality of rollers 201, 202, 203; press belts 204a, 204b wrapped around the plurality of rollers 201, 202, 203; and conveyance belts 205, 206 conveying a stacked body 800. At least one roller of the plurality of rollers 201, 202, 203 drives the press belts 204a, 204b at a prescribed conveyance speed to a prescribed conveyance direction. The press belts 204a, 204b are disposed with a gap in an intersection direction CD perpendicular to the conveyance direction MD such that the press belts 204a, 204b can abut on both end portions 800A, 800B of the stacked body 800 in the intersection direction CD. <P>COPYRIGHT: (C)2012,JPO&INPIT |
