| 摘要 |
PURPOSE: An electro-optical inspection apparatus which uses a probe array is provided to perform high-speed electro-optical inspection with respect to a target object, thereby securing high-speed data. CONSTITUTION: A probe array(120) comprises a plurality of probes(121) which supplies power to an inspection target object. A first stage part comprises a chuck in which a loaded wafer is mounted. A second stage part transfers the probe array near to a target position for optical inspection of a fixed target object. A signal processing and controlling part provides a signal for successively operating each probe among a plurality of probes. An electro/optical analysis part analyzes a property with respect to power outputted from the probe and an optical property with respect to output light received from the target object. |
