| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor that suppresses variation in diaphragm thickness, and a manufacturing method thereof. <P>SOLUTION: A pressure sensor includes a first substrate 10 having a face 11 with a first concave portion 13 formed thereon by an anisotropic etching, and a second substrate 20 having a face 21 connected with the face 11 of the first substrate 10 so that the first concave portion 13 is an enclosed space. The pressure sensor also has a side face that deforms the first concave portion 13 in accordance with pressure applied from a measurement medium. A gauge resistance 40 having a resistance value that varies in accordance with the deformation of the side face is provided on the first substrate 10. <P>COPYRIGHT: (C)2012,JPO&INPIT |
