CATALYST USED IN HYDRODECHLORINATION REACTION OF SILICON TETRACHLORIDE FOR MANUFACTURING TRICHLOROSILANE, AND METHOD FOR MANUFACTURING SAME

摘要

The present invention relates to a catalyst used in hydrodechlorination reaction which converts silicon tetrachloride (SiCl4), a byproduct generated when making silicon wafer for solar cells, into trichlorosilane (HSiCl3), and more specifically relates to 1) an active carbon, 2) an active carbon preprocessed with steam and others, 3) a catalyst manufactured by preprocessing with steam and others an active carbon having silicon and chlorine, and 4) a catalyst introduced with one of the metals from nickel, cobalt, copper, calcium, strontium, and barium, after preprocessing with steam and others the active carbon having silicon and chlorine, and a method for manufacturing same. The four types of catalysts of the present invention have trichlorosilane yield of 9-31% with the reaction pressure of 1-5 atmospheric pressure, the reaction temperature of 600-900, and the reaction time of 5-9 hours, when manufacturing trichlorosilane from hydrodechlorination reaction of silicon tetrachloride. The present invention enables significant decrease in the cost of manufacturing polysilicon, which is a material for silicon solar cell, by reusing silicon tetrachloride, which is a main byproduct generated in the manufacturing process of polysilicon for solar cells, and enhances the economic effect by increasing the yield and reducing the energy use even when the reaction temperature and the pressure are low.